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Air purity class 100 is achieved.
A
heat resistant absolute filter is attached to the ceiling inside
the chamber.
A
slit type wind direction control plate is attached to the lower
part inside the chamber.
Optimum
temperature and humidity distribution has been realized,
maintaining purity.
Available
for the clean room.
A
water-cooled refrigerator is standard. when an air-cooled type is
used, an exhaust duct is installed.
The
power distributor and refrigerator is provided with an exhaust
duct so that no dust will be leaked into the clean room.
When
the exhaust duct cannot be installed, gases are exhausted into the
clean room via an optional HEPA filter.
CVL
type available for low -temperature range
control.
The
Lithium Chloride Chemical dehumidifier has been installed to
realize low-humidity range control.
In
consideration of disassembly/ reassembly upon delivery, a
dehumidifier is attached to the ceiling to save space.
A
high-molecular thin-film sensor is used as a humidity sensor.
The
problem of wet gauze deterioration during low-temperature/
low-humidity operation has been solved.
It
is easier to maintain purity because there is no humidity
detecting water circuit inside the chamber.
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