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Based
on our new temperature control theory MST, KATO has installed more
temperature measurement sensors than the conventional temperature
control methods in order to measure the internal temperature of
the chamber more accurately.
By
averaging the measured value of each temperature measurement
sensor, a current internal temperature of the chamber can be
obtained accurately.
As
in the graph above, the results of temperature control based on
the average value of measured internal temperature of the chamber
show a clear difference in reaching the set temperature, compared
with the conventional temperature control methods.
You
can see that the time required to reach the set temperature has
been shortened.
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